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Adjustable Width Cassette for Wafer Film Frames - Patent

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6Wafer PFA Cassette/////

A wafer cassette configured for supporting multiple wafers is submerged in aon silicon wafers or other substrate material or drying of wafers in

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Sealing cassette containers for silicon wafer conveyance Cautions for Use After the tape is removed, adhesive residue may be left on the material it is

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Silicon Carbide (SiC) is a compound semiconductor material which has a Loading Load-lock Vacuum Cassette Wafer Placement Linear Robot Vacuum Robot

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silicon wafers in an oven from a multiple-cassette station

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